Electron beam probing of silica surface layers on alumina

Nadège Cornet (1, 2, 3, 4) , Dominique Goeuriot (2, 3, 4) , Matthieu Touzin (3, 4) , Christelle Guerret-Piecourt (3) , Denyse Juvé (3) , Daniel Tréheux (3) , Hans-Joachim Fitting (5)

1 Mines Saint-Étienne MSE - École des Mines de Saint-Étienne
2 SMS-ENSMSE - Centre Science des Matériaux et des Structures
3 LTDS - Laboratoire de Tribologie et Dynamique des Systèmes
4 LSPES - Laboratoire de structures et propriétés de l'état solide - UMR 8008
5 Univ Rostock - Physics Institut

The electron beam induced self-consistent charge injection and transport in a layered insulator SiO(2)-Al(2)O(3) is described by means of an electron-hole flight-drift model FDM and an iterative computer simulation. Thermal and field-enhanced detrapping are included by the Poole-Frenkel effect. The surface layer with a modified electric surface conductivity is included which describes the surface leakage currents. Furthermore, it will lead to particular charge incorporation at the interface between the surface layer and the bulk substrate. As a main result the time-dependent spatial distributions of currents j(x,t), charges rho(x,t), field F(x,t), and potential V(x,t) are obtained. The spatial charge distribution with depth shows a quadro-polar plus-minus-plus-minus structure in nanometer dimension.

Mots clés: Electrical and electronic properties; Conductivity; Dielectric properties; Relaxation electric modulus; Films and coatings; Measurement techniques; SEM S100; Microscopy; Scanning electron microscopy; Modeling and simulation; Oxide glasses; Silica; Thermally stimulated and depolarization current

Domaines: Matériaux

Nadège Cornet, Dominique Goeuriot, Matthieu Touzin, Christelle Guerret-Piecourt, Denyse Juvé, et al.. Electron beam probing of silica surface layers on alumina. Journal of Non-Crystalline Solids, 2009, 355 (18-21), pp.1111-1114. ⟨10.1016/j.jnoncrysol.2009.03.007⟩. ⟨hal-00849546⟩